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Filtering by: Author TANUMA, Shigeo Remove constraint Author: TANUMA, Shigeo Keyword argon ion sputtering Remove constraint Keyword: argon ion sputtering Resource type Article Remove constraint Resource type: Article

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Auger Depth Profiling Analyses of InP/GaInAsP Multilayers

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Type of work

Publication1

Keyword

Auger depth profiling analysis1
InP/GaInAsP multilayer specimens1
argon ion sputtering[remove]1

Language

Japanese1

Publisher

Surface Science Society of Japan1

Resource type

Article[remove]1

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open1

Rights Statement Sim

In Copyright1

Material/Specimen

InP/GaInAsP multilayer specimens1

Author

OGIWARA, Toshiya1
TANUMA, Shigeo[remove]1

Journal

Journal of The Surface Science Society of Japan1

National Institute for Materials Science

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