Filtering by: Author S. Tanuma Remove constraint Author: S. Tanuma Journal NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS Remove constraint Journal: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS Type of work Publication Remove constraint Type of work: Publication Publisher Elsevier BV Remove constraint Publisher: Elsevier BV