Filtering by: Author S. Tanuma Remove constraint Author: S. Tanuma Journal NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS Remove constraint Journal: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS Type of work Publication Remove constraint Type of work: Publication Keyword full Penn algorithm Remove constraint Keyword: full Penn algorithm Publisher Elsevier BV Remove constraint Publisher: Elsevier BV Rights Statement Sim Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International Remove constraint Rights Statement Sim: Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International Visibility open Remove constraint Visibility: open