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Filtering by: Author Ogiwara, Toshiya Remove constraint Author: Ogiwara, Toshiya Keyword Sample Cooling Method Remove constraint Keyword: Sample Cooling Method

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Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy. Effects of Zalar Rotation and Liquid Nitrogen Cold Stage

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試料冷却法を併用したAES深さ方向分析によるSiO2/Si熱酸化膜の分析

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Publication2

Keyword

Auger Depth Profiling Analysis2
Sample Cooling Method[remove]2
InP/GaInAsP Multilayers1
SiO2/Si1
Zalar Rotation Method1

Language

Japanese2

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Surface Analysis Society of Japan1
Surface Science Society of Japan1

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Article2

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open2

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In Copyright2

Material/Specimen

InP/GaInAsP Multilayers1
SiO2:103nm/Si-Substrate1

Author

Ogiwara, Toshiya[remove]2
Tanuma, Shigeo2
Ikeo, Nobuyuki1
Nagasawa, Yuji1

Journal

Journal of Surface Analysis 1
Journal of The Surface Science Society of Japan1

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