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OGIWARA, Toshiya
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ala
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Auger Depth Profile Analysis of GaAs/AIAs Thin Film by Synthesized Spectrum Method Using Non-Negative Least Square Curve Fitting
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Auger depth profiling analysis
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GaAs/AlAs multilayer
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non-negative least-square curve fit
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peak separation
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Japanese
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Surface Science Society of Japan
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GaAs/AlAs multilayer
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Author
OGIWARA, Toshiya
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TANUMA, Shigeo
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Journal of The Surface Science Society of Japan
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