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Filtering by: Author OGIWARA, Toshiya Author TANUMA, Shigeo Keyword argon ion sputtering

Description/Abstract:: We have investigated the dependence of the depth resolution of Auger depth profiles of InP/GaInAsP multilayer specimens on the sputtering...
Keyword:: Auger depth profiling analysis, InP/GaInAsP multilayer specimens, and argon ion sputtering
Material/Specimen:: InP/GaInAsP multilayer specimens
Resource Type:: Article
Author:: OGIWARA, Toshiya and TANUMA, Shigeo
Journal:: Journal of The Surface Science Society of Japan
Date Uploaded:: 01/10/2021
Date Modified:: 01/10/2021

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