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Filtering by: Author Nagata, Takahiro Remove constraint Author: Nagata, Takahiro

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English Translation of J. Surf. Anal. 24, 192-205(2018), Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam

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Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam

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Publication2

Keyword

HfO2/Si2
Ultra Low Angle Incidence Ion Beam2
Auger Depth Profiling Analysis1
Auger Depth Profiling analysis1

Language

English1
Japanese1

Publisher

Surface Analysis Society of Japan2

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Article2

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open2

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In Copyright2

Material/Specimen

HfO22

Author

Nagata, Takahiro[remove]2
Ogiwara, Toshiya2
Yoshikawa, Hideki2

Journal

Journal of Surface Analysis2

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