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Filtering by: Author Nagata, Takahiro Remove constraint Author: Nagata, Takahiro Author Yoshikawa, Hideki Remove constraint Author: Yoshikawa, Hideki Type of work Publication Remove constraint Type of work: Publication Keyword Ultra Low Angle Incidence Ion Beam Remove constraint Keyword: Ultra Low Angle Incidence Ion Beam Material/Specimen HfO2 Remove constraint Material/Specimen: HfO2

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