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Nagata, Takahiro
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Ogiwara, Toshiya
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HfO2
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English Translation of J. Surf. Anal. 24, 192-205(2018), Auger Depth Profiling Analysi...
Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence ...
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HfO2/Si
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Ultra Low Angle Incidence Ion Beam
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Auger Depth Profiling Analysis
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Auger Depth Profiling analysis
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Surface Analysis Society of Japan
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HfO2
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Nagata, Takahiro
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Ogiwara, Toshiya
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Yoshikawa, Hideki
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Journal of Surface Analysis
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