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Nagasawa, Yuji
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Ogiwara, Toshiya
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Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy. Effects of Zalar Rotation and Liquid Nitrogen Cold Stage
Description/Abstract:
We have investigated the Auger depth profiling analysis of InP/GaInAsP multilayer specimens. It is difficult to obtain the Auger depth pr...
Keyword:
Auger Depth Profiling Analysis
,
InP/GaInAsP Multilayers
,
Zalar Rotation Method
, and
Sample Cooling Method
Material/Specimen:
InP/GaInAsP Multilayers
Resource Type:
Article
Author:
Ogiwara, Toshiya
,
Tanuma, Shigeo
,
Nagasawa, Yuji
, and
Ikeo, Nobuyuki
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
09/09/2021
Date Modified:
09/09/2021
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Keyword
Auger Depth Profiling Analysis
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InP/GaInAsP Multilayers
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Sample Cooling Method
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Zalar Rotation Method
1
Language
Japanese
1
Publisher
Surface Science Society of Japan
1
Resource type
Article
1
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open
1
Rights Statement Sim
In Copyright
1
Material/Specimen
InP/GaInAsP Multilayers
1
Author
Ikeo, Nobuyuki
1
Nagasawa, Yuji
[remove]
1
Ogiwara, Toshiya
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1
Tanuma, Shigeo
1
Journal
Journal of The Surface Science Society of Japan
1