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NAGATA, Takahiro
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1.
Raw data files for Fig. 5 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Description/Abstract:
We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:
Auger depth profiling analysis
,
HfO2/Si
, and
Ultra low angle incidence ion beam
Resource Type:
Dataset
Data origin:
experiment
Author:
OGIWARA, Toshiya
,
NAGATA, Takahiro
, and
YOSHIKAWA, Hideki
Date Uploaded:
20/04/2023
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Auger depth profiling analysis
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HfO2/Si
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Ultra low angle incidence ion beam
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National Institute for Materials Science
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spectroscopy
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Author
NAGATA, Takahiro
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OGIWARA, Toshiya
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YOSHIKAWA, Hideki
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