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Mitsuru Okigawa
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Takashi Shinohe
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HVPE
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Rapid growth of α-Ga2O3 by HCl-boosted halide vapor phase epitaxy and effect of precursor supply conditions on crystal properties
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Phase-controlled epitaxial lateral overgrowth of α-Ga2O3 by halide vapor phase epitaxy
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HVPE
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α-Ga2O3
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Katsuaki Kawara
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Mitsuru Okigawa
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
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SEMICONDUCTOR SCIENCE AND TECHNOLOGY
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