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Koki Kobayashi
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Impact of Sequential N Ion Implantation on Extended Defects and Mg Distribution in Mg Ion‐Implanted GaN
Description/Abstract:
In Mg ion implantation doping of GaN, sequential N ion implantation reportedly changes Mg concentrations in the Mg ion-implanted region a...
Keyword:
atom probe tomography
,
gallium nitride
, and
transmission electron microscopy
Resource Type:
Article
Author:
Emi Kano
,
Jun Uzuhashi
,
Koki Kobayashi
,
Kosuke Ishikawa
,
Kyosuke Sawabe
,
Tetsuo Narita
,
Kacper Sierakowski
,
Michal Bockowski
,
Tadakatsu Ohkubo
,
Tetsu Kachi
, and
Nobuyuki Ikarashi
Journal:
physica status solidi (RRL) – Rapid Research Letters
Date Uploaded:
20/09/2024
Atomic resolution analysis of extended defects and Mg agglomeration in Mg-ion-implanted GaN and their impacts on acceptor formation
Description/Abstract:
We used atomic-scale direct observations by transmission electron microscopy (TEM) and atom probe tomography to clarify the crystallograp...
Keyword:
atom probe tomography
,
gallium nitride
, and
transmission electron microscopy
Resource Type:
Article
Author:
Emi Kano
,
Keita Kataoka
,
Jun Uzuhashi
,
Kenta Chokawa
,
Hideki Sakurai
,
Akira Uedono
,
Tetsuo Narita
,
Kacper Sierakowski
,
Michal Bockowski
,
Ritsuo Otsuki
,
Koki Kobayashi
,
Yuta Itoh
,
Masahiro Nagao
,
Tadakatsu Ohkubo
,
Kazuhiro Hono
,
Jun Suda
,
Tetsu Kachi
, and
Nobuyuki Ikarashi
Journal:
JOURNAL OF APPLIED PHYSICS
Date Uploaded:
28/09/2023
Date Modified:
28/09/2023
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atom probe tomography
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gallium nitride
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transmission electron microscopy
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English
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AIP Publishing
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Wiley
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Rights Statement Sim
Creative Commons BY Attribution 4.0 International
1
Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International
1
Author
Emi Kano
2
Jun Uzuhashi
2
Kacper Sierakowski
2
Koki Kobayashi
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Michal Bockowski
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JOURNAL OF APPLIED PHYSICS
1
physica status solidi (RRL) – Rapid Research Letters
1