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Filtering by: Author Jun Suda Remove constraint Author: Jun Suda Keyword atom probe tomography Remove constraint Keyword: atom probe tomography

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Development of p-type Ion Implantation Technique for Realization of GaN Vertical MOSFETs

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Atomic resolution analysis of extended defects and Mg agglomeration in Mg-ion-implanted GaN and their impacts on acceptor formation

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Publication2

Keyword

atom probe tomography[remove]2
gallium nitride2
transmission electron microscopy2

Language

English2

Publisher

AIP Publishing1
IEEE1

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Article1
ProceedingsArticle1

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open2

Rights Statement Sim

Creative Commons BY Attribution 4.0 International2

Author

Jun Suda[remove]2
Jun Uzuhashi2
Tadakatsu Ohkubo2
Akira Uedono1
Emi Kano1
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Journal

JOURNAL OF APPLIED PHYSICS1

National Institute for Materials Science

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