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Calculations of Electron Inelastic Mean Free Paths (IMFPs). XIV. Calculated IMFPs for LiF and Si3N4 and Development of an Improved Predictive IMFP Formula

Description/Abstract:

We report inelastic mean free paths (IMFPs) of Si3N4 and LiF for electron energies from 50 eV to 200 keV that were calculated from their ...

Keyword:

IMFP, Improved Predictive IMFP Formula, JTP equation, TPP-2M, and electron inelastic mean free path

Resource Type:

Article

Author:

Jablonski, Aleksander, Tanuma, Shigeo, and Powell, C. Cedric

Journal:

Surface and Interface Analysis

Date Uploaded:

29/05/2023

Date Modified:

06/06/2023