Index Catalog // MDR

Start Over

Filtering by: Characterization methods spectroscopy Data origin experiment Type of work Dataset Keyword Auger depth profiling analysis Rights Statement Sim In Copyright

1. Raw data files for Fig. 5 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:: We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:: Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam
Resource Type:: Dataset
Data origin:: experiment
Author:: OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki
Date Uploaded:: 20/04/2023

1. Raw data files for Fig. 5 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Limit your search

Type of work

Keyword

Publisher

Resource type

Visibility

Rights Statement Sim

Data origin

Characterization methods

Author

Search Constraints

Search Results

1. Raw data files for Fig. 5 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Limit your search