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Kosuke Minami
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anisotropic materials
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Topology optimization for piezoresistive nanomechanical surface stress sensors in anisotropic <111> orientations.
Description/Abstract:
MEMS-based piezoresistive nanomechanical sensors are compact sensing platforms widely employed in vapor sensing, environmental monitoring...
Keyword:
anisotropic materials
,
nanomechanical sensors
,
piezoresistive microcantilever
,
surface stress
, and
topology optimization
Resource Type:
Article
Author:
Kosuke Minami
Journal:
Nano Express
Date Uploaded:
04/12/2023
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anisotropic materials
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nanomechanical sensors
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piezoresistive microcantilever
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surface stress
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topology optimization
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English
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IOP Publishing
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Creative Commons BY Attribution 4.0 International
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Author
Kosuke Minami
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Nano Express
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