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Filtering by: Journal JOURNAL OF CRYSTAL GROWTH Remove constraint Journal: JOURNAL OF CRYSTAL GROWTH Keyword etching Remove constraint Keyword: etching

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Visualization of threading dislocations in an α-Ga2O3 epilayer by HCl gas etching

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Type of work

Publication1

Keyword

dislocation1
etching[remove]1
α-Ga2O31

Language

English1

Publisher

Elsevier BV1

Resource type

Article1

Visibility

open1

Rights Statement Sim

Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International1

Author

Shingo Yagyu1
Takashi Shinohe1
Yuichi Oshima1

Journal

JOURNAL OF CRYSTAL GROWTH[remove]1

National Institute for Materials Science

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