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Calculations of Electron Inelastic Mean Free Paths II. Data for 27 Elements over the 50 - 2000 eV Range

Description/Abstract:

We report calculations of electron inelastic mean free paths (IMFPs) for 50-2000 eV electrons in a group of 27 elements (C, Mg, Al, Si, T...

Keyword:

IMFPs, TPP-2, a group of 27 elements, and electron inelastic mean free paths

Resource Type:

Article

Author:

Tanuma, S., Powell, C. J., and Penn, D. R.

Journal:

Surface and Interface Analysis

Date Uploaded:

12/07/2023