Filtering by: Journal 表面と真空 Remove constraint Journal: 表面と真空 Funder JSPS Remove constraint Funder: JSPS Type of work Publication Remove constraint Type of work: Publication Keyword Membrane-type Surface stress Sensor Remove constraint Keyword: Membrane-type Surface stress Sensor Rights Statement Sim Creative Commons BY-NC Attribution-NonCommercial 4.0 International Remove constraint Rights Statement Sim: Creative Commons BY-NC Attribution-NonCommercial 4.0 International