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Effect of defects on Q factors of single-crystal diamond MEMS resonators

Description/Abstract:

A resonator with a high Q factor is generally pursued in the single-crystal diamond (SCD) microelectromechanical system (MEMS) for high-p...

Keyword:

Diamond, MEMS, Q factor

Resource Type:

Article

Author:

Zilong Zhang, Guo Chen, Keyun Gu, Satoshi Koizumi, and Meiyong Liao

Journal:

Functional diamond

Date Uploaded:

05/03/2024