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Ogiwara, Toshiya
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Tanuma, Shigeo
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Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy. Effects of Zalar Rotation and Liquid Nitrogen Cold Stage
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Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at the Glancing Incidence using an Inclined Specimen Holder
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InP/GaInAs多層膜のAES深さ方向分析のラウンドロビン試験報告(I)
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試料冷却法を併用したAES深さ方向分析によるSiO2/Si熱酸化膜の分析
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High-Sensitivity and High-Depth Resolution Auger Depth Profiling Using an Inclined Holder based on Geometric Characteristics of Auger Electron Spectroscopy Apparatus Equipped with Concentric Hemispherical Analyzer
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Arイオンスパッタリングされた各種化合物半導体表面のSEM観察
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InP/GaInAsP多層膜におけるAES深さ分解能の温度依存性
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