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NAGATA, Takahiro
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YOSHIKAWA, Hideki
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Raw data files for Fig. 5 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
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Auger depth profiling analysis
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HfO2/Si
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Ultra low angle incidence ion beam
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National Institute for Materials Science
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NAGATA, Takahiro
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OGIWARA, Toshiya
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YOSHIKAWA, Hideki
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