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Takashi Shinohe
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Yuichi Oshima
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Elsevier BV
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Visualization of threading dislocations in an α-Ga2O3 epilayer by HCl gas etching
Description/Abstract:
Threading dislocations in a heteroepitaxial α-Ga2O3 film was visualized as etch pits on the surface. We found that etch pits were formed ...
Keyword:
dislocation
,
etching
, and
α-Ga2O3
Resource Type:
Article
Author:
Yuichi Oshima
,
Shingo Yagyu
, and
Takashi Shinohe
Journal:
JOURNAL OF CRYSTAL GROWTH
Date Uploaded:
22/01/2024
Date Modified:
23/01/2024
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dislocation
1
etching
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α-Ga2O3
1
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English
1
Publisher
Elsevier BV
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1
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Article
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Rights Statement Sim
Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International
1
Author
Shingo Yagyu
1
Takashi Shinohe
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1
Yuichi Oshima
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1
Journal
JOURNAL OF CRYSTAL GROWTH
1