Index Catalog // MDR

Start Over

Filtering by: Author Nagata, Takahiro Author Ogiwara, Toshiya Journal Journal of Surface Analysis Keyword Auger Depth Profiling analysis

Description/Abstract:: We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:: Auger Depth Profiling analysis, HfO2/Si, and Ultra Low Angle Incidence Ion Beam
Material/Specimen:: HfO2
Resource Type:: Article
Author:: Yoshikawa, Hideki, Ogiwara, Toshiya, and Nagata, Takahiro
Journal:: Journal of Surface Analysis
Date Uploaded:: 25/05/2021
Date Modified:: 26/05/2021

Limit your search