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Filtering by: Author Yuichi Oshima Remove constraint Author: Yuichi Oshima Funder The Murata Science Foundation Remove constraint Funder: The Murata Science Foundation Keyword Ga2O3 Remove constraint Keyword: Ga2O3

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Anisotropic non-plasma HCl gas etching of (010) β-Ga2O3 substrate

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Type of work

Publication1

Keyword

Ga2O3[remove]1
HCl gas etching1

Language

English1

Publisher

IOP Publishing1

Resource type

Article1

Visibility

open1

Rights Statement Sim

Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International1

Author

Takayoshi Oshima1
Yuichi Oshima[remove]1

Funder

The Murata Science Foundation[remove]1

Journal

Applied Physics Express1

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