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Calculations of Electron Inelastic Mean Free Paths for 31 Materials

Description/Abstract:

We present new calculations of electron inelastic mean free paths (IMFPs) for 200-2000 eV electrons in 27 elements (C, Mg, Al, Si, Ti, V,...

Keyword:

Bethe equation, IMFP, TPP, elemental solids, and inelastic mean free path

Resource Type:

Article

Author:

Tanuma, S., Powell, C. J., and Penn, D. R.

Journal:

Surface and Interface Analysis

Date Uploaded:

05/06/2023

Date Modified:

09/06/2023