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English Translation of J. Surf. Anal. 24, 192-205(2018), Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam
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InP/GaInAs多層膜のAES深さ方向分析のラウンドロビン試験報告(I)
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試料冷却法を併用したAES深さ方向分析によるSiO2/Si熱酸化膜の分析
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High-Sensitivity and High-Depth Resolution Auger Depth Profiling Using an Inclined Holder based on Geometric Characteristics of Auger Electron Spectroscopy Apparatus Equipped with Concentric Hemispherical Analyzer
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Auger Depth Profiling Analysis of FeNi/CoFeB/FeNi Specimen Using an Ultra Low Angle Incidence Ion Beam
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InP/GaInAsP多層膜におけるAES深さ分解能の温度依存性
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