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TANUMA, Shigeo
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InP/GaInAsP multilayer specimens
Remove constraint Keyword: InP/GaInAsP multilayer specimens
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Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy, Quantitative Evaluation of the Surface Roughness Caused by Ion Sputtering
Description/Abstract:
We have conducted Auger depth profiling analyses of InP/GaInAsP multilayer specimens, in which the surface roughness was caused by the ar...
Keyword:
Auger depth profiling analysis
,
InP/GaInAsP multilayer specimens
,
surface roughness
,
atomic force microscope
, and
depth resolution function
Material/Specimen:
InP/GaInAsP multilayer specimens
Resource Type:
Article
Author:
OGIWARA, Toshiya
and
TANUMA, Shigeo
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
01/10/2021
Date Modified:
01/10/2021
Auger Depth Profiling Analyses of InP/GaInAsP Multilayers
Description/Abstract:
We have investigated the dependence of the depth resolution of Auger depth profiles of InP/GaInAsP multilayer specimens on the sputtering...
Keyword:
Auger depth profiling analysis
,
InP/GaInAsP multilayer specimens
, and
argon ion sputtering
Material/Specimen:
InP/GaInAsP multilayer specimens
Resource Type:
Article
Author:
OGIWARA, Toshiya
and
TANUMA, Shigeo
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
01/10/2021
Date Modified:
01/10/2021
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2
Keyword
Auger depth profiling analysis
2
InP/GaInAsP multilayer specimens
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argon ion sputtering
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atomic force microscope
1
depth resolution function
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Language
Japanese
2
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Surface Science Society of Japan
2
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Article
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Rights Statement Sim
In Copyright
2
Material/Specimen
InP/GaInAsP multilayer specimens
2
Author
OGIWARA, Toshiya
2
TANUMA, Shigeo
[remove]
2
Journal
Journal of The Surface Science Society of Japan
2