Index Catalog // MDR

Start Over

Filtering by: Journal Journal of The Surface Science Society of Japan Keyword InP/GaInAsP multilayer specimens Keyword atomic force microscope Language Japanese Visibility open

Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy, Quantitative Evaluation of the Surface Roughness Caused by Ion Sputtering

Description/Abstract:

We have conducted Auger depth profiling analyses of InP/GaInAsP multilayer specimens, in which the surface roughness was caused by the ar...

Keyword:

Auger depth profiling analysis, InP/GaInAsP multilayer specimens, surface roughness, atomic force microscope, and depth resolution function

Material/Specimen:

InP/GaInAsP multilayer specimens

Resource Type:

Article

Author:

OGIWARA, Toshiya and TANUMA, Shigeo

Journal:

Journal of The Surface Science Society of Japan

Date Uploaded:

01/10/2021

Date Modified:

01/10/2021

Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy, Quantitative Evaluation of the Surface Roughness Caused by Ion Sputtering

Limit your search

Type of work

Keyword

Language

Publisher

Resource type

Visibility

Rights Statement Sim

Material/Specimen

Author

Journal

Search Constraints

Search Results

Limit your search