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Reduction of dislocation density in α-Ga2O3 epilayers via rapid growth at low temperatures by halide vapor phase epitaxy
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Anisotropic non-plasma HCl gas etching of (010) β-Ga2O3 substrate
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Plasma-free dry etching of (001) β-Ga2O3 substrates by HCl gas
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Epitaxial lateral overgrowth of r-plane α-Ga2O3 with stripe masks along <-12-10>
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Epitaxial growth of phase-pure e-Ga2O3 by halide vapor phase epitaxy
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Hydride Vapor Phase Epitaxy and characterization of High-Quality ScN epilayers
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Progress and challenges in the development of ultra-wide bandgap semiconductor α-Ga2O3 toward realizing power device applications
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Materials issues and devices of α- and β-Ga2O3
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Halide Vapor Phase Epitaxy of twin-free a-Ga2O3 on sapphire (0001) substrates
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Visualization of threading dislocations in an α-Ga2O3 epilayer by HCl gas etching
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