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Filtering by: Author Jiangwei Liu Journal Nanomaterials Rights Statement Sim Creative Commons BY Attribution 4.0 International

Experimental formation and mechanism study for super-high dielectric constant AlOx/TiOy nanolaminates

Description/Abstract:

Super-high dielectric constant (k) AlOx/TiOy nanolaminates (ATO NLs) are deposited by an atomic layer deposition technique for applicatio...

Keyword:

ATO, nanolaminate, and super-high dielectric constant

Resource Type:

Article

Author:

Jiangwei Liu, Masayuki Okamura, Hisanori Mashiko, Masataka Imura, Meiyong Liao, Ryosuke Kikuchi, Michio Suzuka, and Yasuo Koide

Journal:

Nanomaterials

Date Uploaded:

05/10/2023

Date Modified:

05/10/2023