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Ga2O3
5
HVPE
3
ELO
2
SnO2
2
Superlattice
2
selective area growth
2
α-Ga2O3
2
GeO2
1
HCl gas etching
1
TiO2
1
domain
1
lithography
1
ε-Ga2O3
1
κ-Ga2O3
1