プロシーディングス論文 Effect of Ultra-High Vacuum Annealing and Hydrogen Plasma Treatment on the Resonance Properties of Single-Crystal Diamond MEMS Cantilevers
Guo Chen (author) (この著者で検索)
ORCID https://orcid.org/0009-0004-9263-5616 (unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Zilong Zhang (author) (この著者で検索)
ORCID https://orcid.org/0000-0002-9759-9253
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Liwen Sang (author) (この著者で検索)
ORCID https://orcid.org/0000-0003-0946-1025
National Institute for Materials Science Research Center for Materials Nanoarchitectonics (MANA)/Quantum Materials Field/Thin Film Electronics Group
ORCID ;
Yasuo Koide (author) (この著者で検索)
ORCID https://orcid.org/0000-0001-8321-9822
National Institute for Materials Science Research Center for Electronic and Optical Materials
SAMURAI NIMS Researchers Directory SAMURAI
ORCID SAMURAI ;
Satoshi Koizumi (author) (この著者で検索)
ORCID https://orcid.org/0000-0003-4961-5658
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
SAMURAI NIMS Researchers Directory SAMURAI
ORCID SAMURAI ;
Meiyong Liao (author) (この著者で検索)
ORCID https://orcid.org/0000-0003-1361-4266
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
SAMURAI NIMS Researchers Directory SAMURAI
ORCID SAMURAI
講演予稿集 16p-A408-1.pdf
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引用
Guo Chen, Zilong Zhang, Liwen Sang, Yasuo Koide, Satoshi Koizumi, Meiyong Liao. Effect of Ultra-High Vacuum Annealing and Hydrogen Plasma Treatment on the Resonance Properties of Single-Crystal Diamond MEMS Cantilevers. https://doi.org/10.48505/nims.8654

説明:

(abstract)

In this work, we investigated the effect of ultra-high vacuum annealing and hydrogen (H2) plasma treatment on the resonance properties of SCD MEMS cantilevers. The resonance frequency and Q factors were measured and analyzed after annealing from 900 to 1100℃ followed by H2 plasma treatment. Despite the annealing and plasma treatment, the resonance frequency of the SCD cantilevers well follows the inverse power law relationship with the length of different SCD MEMS cantilevers, revealing the excellent reliability of SCD MEMS, as shown in Fig.1 (a). It was found that the Q factors were markedly improved from the typical value around 8,000 to over 15,000 after the annealing treatment at 1100℃ for 7 hours (Fig.1(b)).

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キーワード: Diamond, MEMS

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会議: 2023年第70回応用物理学会春季学術講演会 (2023-03-15 - 2023-03-18)

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原稿種別: 論文以外のデータ

MDR DOI: https://doi.org/10.48505/nims.8654

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更新時刻: 2026-10-13 16:46:48 +0900

MDRでの公開時刻: 2026-10-13 18:28:36 +0900

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