@proceedings{chen,
  title = {Effect of Ultra-High Vacuum Annealing and Hydrogen Plasma Treatment on the Resonance Properties of Single-Crystal Diamond MEMS Cantilevers},
  author = {Guo Chen, Zilong Zhang, Liwen Sang, Yasuo Koide, Satoshi Koizumi, Meiyong Liao},
  publisher = {},
  year = {},
  keywords = {Diamond, MEMS}
}