Topology optimization for piezoresistive nanomechanical surface stress sensors in anisotropic 111> orientations.

論文

著者

Kosuke Minami

キーワード

piezoresistive microcantilever, surface stress, topology optimization, nanomechanical sensors, anisotropic materials

刊行年月日

2023-09-01

更新時刻

2024-01-05 22:14:00 +0900