Surface modification of aluminum on a silicon chip by citric acid treatment

論文

著者

Moataz Mekawy ; Kazuya Iida ; Akitsu Shigetou ; Jin Kawakita

キーワード

Aluminum, Surface treatment, Citric acid, Sensor, Moisture

刊行年月日

2025-08-18

更新時刻

2025-08-25 12:30:35 +0900