Analyses of oxygen precipitates in CZ-Si by X-ray diffuse scattering using parallel X-ray beam

ジャーナル論文

著者

Tomoyuki Horikawa (author) (この著者で検索)

Tomoyuki Horikawa ;

Yoshiyuki Tsusaka (author) (この著者で検索)

Yoshiyuki Tsusaka ;

Junji Matsui (author) (この著者で検索)

Junji Matsui ;

Tetsuya Tohei (author) (この著者で検索)

Tetsuya Tohei ;

Yusuke Hayashi (author) (この著者で検索)

https://orcid.org/0000-0001-5672-1497

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Yusuke Hayashi ;

Akira Sakai (author) (この著者で検索)

Akira Sakai

キーワード

Silicon, X-ray diffuse scattering

刊行年月日

2025-04-01

更新時刻

2026-02-14 21:58:00 +0900