Step-and-terrace surface formation on (001) β-Ga₂O₃ by wet etching using 2.38 wt% tetramethylammonium hydroxide (TMAH) lithographic developer

ジャーナル論文

著者

Takayoshi Oshima (author) (この著者で検索)

https://orcid.org/0000-0001-8550-9735

NIMS Researchers Directory SAMURAI

Takayoshi Oshima

キーワード

Ga2O3, TMAH, Wet etching

刊行年月日

2025-08-01

更新時刻

2025-08-18 16:30:36 +0900