Phase Identification of 850 nm Thick 7%YO_1.5–93%HfO₂ Films by Surface and Cross-Sectional Raman Spectroscopies

論文

著者

Takanori Mimura ; Yuma Takahashi ; Takahisa Shiraishi ; Masanori Kodera ; Reijiro Shimura ; Keisuke Ishihama ; Kazuki Okamoto ; Hiroki Moriwake ; Ayako Taguchi ; Takao Shimizu ; Yasuhiro Fujii ; Akitoshi Koreeda ; Hiroshi Funakubo

キーワード

Raman spectroscopy, field-induced phase transition, Multiple phase, HfO2-based ferroelectric film

刊行年月日

2024-04-23

更新時刻

2024-12-24 13:59:01 +0900