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Phase identification of 850 nm thick 7%YO1.5–93%HfO2 films was carried out by analyzing both the surface and cross-sectional Raman spectra together with conventional X-ray diffraction (XRD). Preparation of 7%YO1.5–93%HfO2 films was conducted by deposition at room temperature on Pt-coated (100)Si substrates by pulsed laser deposition and postheat-treatment at 600–1100 °C under atmospheric N2 flow. The cross-sectional Raman spectra changed with the postheat-treatment temperature in accordance with the crystal structure determined by XRD measurements. Moreover, surface Raman analysis revealed that the crystalline phase transformed from the tetragonal phase (P42/nmc) to the orthorhombic phase (Pca21) when an electric field was applied. These data clearly show that Raman spectroscopy is a powerful tool for detecting the constituent phase with a spatial resolution on the order of several micrometers. In addition, a good signal-to-noise ratio was obtained from the cross-sectional Raman spectrum of 850 nm thick 7%YO1.5–93%HfO2 films, indicating promise for future measurements of the strain state and phase distribution along the thickness direction using this good spatial resolution.

権利情報:

• In Copyright
  This document is the unedited Author’s version of a Submitted Work that was subsequently accepted for publication in ACS Applied Electronic Materials, copyright © 2024 American Chemical Society after peer review. To access the final edited and published work see https://doi.org/10.1021/acsaelm.4c00134.

キーワード: Raman spectroscopy, field-induced phase transition, Multiple phase, HfO2-based ferroelectric film

刊行年月日: 2024-04-23

出版者: American Chemical Society (ACS)

掲載誌:

• ACS Applied Electronic Materials (ISSN: 26376113) vol. 6 issue. 4 p. 2500-2506

研究助成金:

• Ministry of Education, Culture, Sports, Science and Technology JPJ011438
• Ministry of Education, Culture, Sports, Science and Technology JPMXP1122683430
• Japan Society for the Promotion of Science 19H00758
• Japan Society for the Promotion of Science 21H01617
• Japan Society for the Promotion of Science 22K18307
• Japan Society for the Promotion of Science 23K13364

原稿種別: 査読前原稿 (Author's original)

MDR DOI: https://doi.org/10.48505/nims.5210

公開URL: https://doi.org/10.1021/acsaelm.4c00134

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更新時刻: 2024-12-24 13:59:01 +0900

MDRでの公開時刻: 2024-12-24 13:59:01 +0900