Smart-cut-assisted fabrication of ultrathin diamond NEMS cantilevers

プロシーディングス論文

著者

Guo Chen (author) (この著者で検索)

https://orcid.org/0009-0004-9263-5616 (unauthenticated)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

Guo Chen ;

Wen Zhao (author) (この著者で検索)

https://orcid.org/0000-0001-8159-8195 (unauthenticated)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

Wen Zhao ;

Zhaozong Zhang (author) (この著者で検索)

https://orcid.org/0009-0003-8745-4469 (unauthenticated)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

Zhaozong Zhang ;

Satoshi Koizumi (author) (この著者で検索)

https://orcid.org/0000-0003-4961-5658

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI

Satoshi Koizumi ;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI

Meiyong Liao

キーワード

Diamond, MEMS

刊行年月日

更新時刻

2026-10-16 10:58:21 +0900