Effect of temperature and HCl partial pressure on the selective area gas etching of (001) β-Ga2O3

ジャーナル論文

著者

Yuichi Oshima (author) (この著者で検索)

https://orcid.org/0000-0001-8293-4891

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Yuichi Oshima ;

Takayoshi Oshima (author) (この著者で検索)

https://orcid.org/0000-0001-8550-9735

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Takayoshi Oshima

キーワード

β-Ga2O3, etching

刊行年月日

2023-08-01

更新時刻

2024-08-21 08:30:30 +0900