Strain Control of (001)-Polar-Axis-Oriented Epitaxial Y-Doped HfO₂ Thin Films

ジャーナル論文

著者

Yoshiki Maekawa (author) (この著者で検索)

Yoshiki Maekawa ;

Koji Hirai (author) (この著者で検索)

Koji Hirai ;

Kazuki Okamoto (author) (この著者で検索)

Kazuki Okamoto ;

Takao Shimizu (author) (この著者で検索)

https://orcid.org/0000-0001-9508-7601

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Takao Shimizu ;

Hiroshi Funakubo (author) (この著者で検索)

Hiroshi Funakubo

キーワード

Ferroelectric HfO2-based film, Epitaxial film, {100} Orientation control, Polar axis orientation, Pulse laser deposition

刊行年月日

2024-07-25

更新時刻

2024-12-24 13:58:35 +0900