キーワード: Si
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2 件のレコードが見つかりました。

[Vol. 28]Opening the Way to Mobile Olfaction with Nanomechanical Sensors _ WPI-MANA.pdf
[Research Highlights Vol.28] Opening the Way to Mobile Olfaction with Nanomechanical Sensors
雑誌
コレクション
Research Highlights
著者
International Center for Materials Nanoarchitectonics (WPI-MANA) (author) (この著者で検索)
National Institute for Materials Science
キーワード
Olfactory sensor, Membrane-type Surface stress Sensor (MSS), Nanomechanical sensor, Artificial Olfaction, Industry-government-academia joint research framework, Si, Polymer, Nanoparticle
刊行年月日
2016-12-02
更新時刻
2023-12-25 00:30:19 +0900
[Vol. 68]New GaN MEMS Resonator Is Temperature-Stable up to 600 K_ WPI-MANA.pdf
[Research Highlights Vol.68] New GaN MEMS Resonator Is Temperature-Stable up to 600 K
雑誌
コレクション
Research Highlights
著者
International Center for Materials Nanoarchitectonics (WPI-MANA) (author) (この著者で検索)
National Institute for Materials Science
キーワード
GaN, MEMS, NEMS, energy storage, temperature coefficient of frequency, AlN, Si, Strain
刊行年月日
2021-07-13
更新時刻
2023-12-26 21:38:08 +0900