キーワード: MEMS
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2 件のレコードが見つかりました。 1件目から2件目まで表示します。

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manuscript.pdf
20.1 A 3.5×3.5mm2 1.47mW/ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal-Gas-Sensor Chip Stack
ジャーナル論文
著者
Kotaro Naruse (author) (この著者で検索)
;
Naru Kato (author) (この著者で検索)
;
Takuma Matsumori (author) (この著者で検索)
;
Jun Shlomi (author) (この著者で検索)
;
Yoshihiro Midoh (author) (この著者で検索)
;
Tetsuya Hirose (author) (この著者で検索)
;
Gaku Imamura (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Genki Yoshikawa (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Constantine Sideris (author) (この著者で検索)
;
Noriyuki Miura (author) (この著者で検索)
キーワード
gas sensor, CMOS, MEMS
刊行年月日
2025-02-16
更新時刻
2025-12-25 16:21:05 +0900
abstract Zhang_Liao.docx
Characterization of Young’s Modulus Anisotropy of Single-Crystal Diamond
プレゼンテーション
著者
Zhaozong Zhang (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Wen Zhao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Guo Chen (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Satoshi Koizumi (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI ;
Meiyong Liao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
更新時刻
2025-11-06 12:30:27 +0900
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