キーワード: MEMS
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3 件のレコードが見つかりました。 1件目から3件目まで表示します。

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NDNC2025_abstract_Chen.docx
High Quality Factor Single-Crystal Diamond NEMS Cantilevers Fabricated by A Smart-Cut Method
会議発表ポスター
著者
Guo Chen (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Wen Zhao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Keyun Gu (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Satoshi Koizumi (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI ;
Yasuo Koide (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Next-generation Semiconductor Group
ORCID SAMURAI ;
Meiyong Liao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
更新時刻
2025-05-22 08:30:08 +0900
perspective-20241226.pdf
A perspective on diamond MEMS magnetic sensors
ジャーナル論文
著者
ORCID ;
Keyun Gu (author) (この著者で検索)
;
Masaya Toda (author) (この著者で検索)
ORCID ; ORCID SAMURAI
キーワード
Diamond, MEMS, magnetic sensors
刊行年月日
2025-03-01
更新時刻
2025-05-19 16:30:19 +0900
Maunscript (Clean).docx
Low-Energy Dissipation Diamond MEMS
ジャーナル論文
著者
Guo Chen (author) (この著者で検索)
;
Satoshi Koizumi (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Yasuo Koide (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Meiyong Liao (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
2024-09-27
更新時刻
2025-07-29 08:30:21 +0900
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