Transfer of Freestanding Fluoropolymer Films for Advanced Semiconductor Devices

ジャーナル論文

著者

Mohammad Monish (author) (この著者で検索)

https://orcid.org/0000-0002-2352-2640

NIMS Researchers Directory SAMURAI

Mohammad Monish ;

Koki Hino (author) (この著者で検索)

https://orcid.org/0009-0000-9131-8097

NIMS Researchers Directory SAMURAI

Koki Hino ;

Yosuke Sasama (author) (この著者で検索)

https://orcid.org/0000-0002-8358-6101

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Yosuke Sasama ;

Masato Urakami (author) (この著者で検索)

Masato Urakami ;

Takehiro Ota (author) (この著者で検索)

https://orcid.org/0009-0006-1550-1395 (unauthenticated)

Takehiro Ota ;

Kenji Sakamoto (author) (この著者で検索)

https://orcid.org/0000-0002-1379-874X

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Kenji Sakamoto ;

Kenichiro Takakura (author) (この著者で検索)

Kenichiro Takakura ;

Yamaguchi Takahide (author) (この著者で検索)

https://orcid.org/0000-0003-0208-7317

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Yamaguchi Takahide

キーワード

freestanding fluoropolymer film, dielectric film transfer, low-κ dielectric, low interface trap density, diamond FET

刊行年月日

2026-09-09

更新時刻

2026-09-25 17:03:02 +0900