Systematic study of FIB-induced damage for the high-quality TEM sample preparation

ジャーナル論文

著者

Jun Uzuhashi (author) (この著者で検索)

https://orcid.org/0000-0003-2023-8158

NIMS Researchers Directory SAMURAI

Jun Uzuhashi ;

Tadakatsu Ohkubo (author) (この著者で検索)

https://orcid.org/0000-0003-3548-1951

NIMS Researchers Directory SAMURAI

Tadakatsu Ohkubo

キーワード

focused ion beam, transmission electron microscopy

刊行年月日

2024-04-26

更新時刻

2024-05-07 15:32:35 +0900