NF3 and F2 gas fluorination of GaN surface and Pt/GaN interface analyzed by hard X-ray photoelectron spectroscopy

論文

著者

Asahiko Matsuda ; Takashi Teramoto ; Takahiro Nagata ; Dominic Gerlach ; Peng Shen ; Shigenori Ueda ; Takako Kimura ; Christian Dussarrat ; Toyohiro Chikyow

キーワード

Fluorination, Surface passivation, hard X-ray photoelectron spectroscopy, Gallium nitride

刊行年月日

2024-03-19

更新時刻

2026-03-19 14:27:24 +0900